Joule-Assisted Silicidation for Short-Channel Silicon Nanowire Devices
نویسندگان
چکیده
منابع مشابه
Joule-assisted silicidation for short-channel silicon nanowire devices.
We report on a technique enabling electrical control of the contact silicidation process in silicon nanowire devices. Undoped silicon nanowires were contacted by pairs of nickel electrodes, and each contact was selectively silicided by means of the Joule effect. By a real-time monitoring of the nanowire electrical resistance during the contact silicidation process we were able to fabricate nick...
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ژورنال
عنوان ژورنال: ACS Nano
سال: 2011
ISSN: 1936-0851,1936-086X
DOI: 10.1021/nn202524j